Formation of dielectric silicon compounds by reactive magnetron sputtering
نویسندگان
چکیده
منابع مشابه
Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering
Silicon nitride and silicon nitride-based ceramics have several favorable material properties, such as high hardness and good wear resistance, which makes them important materials for the coating industry. This thesis focuses the synthesis of silicon nitride, silicon oxynitride, and silicon carbonitride thin films by reactive magnetron sputtering. The films were characterized based on their che...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2016
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/747/1/012022